NOVELLUS DESIGN, LLC
President's Bio
Piezoelectric Micropump:  

ABSTRACT

A piezoelectric micropump is disclosed for pumping fluid from a
container to a delivery point in low volumes and at controlled flow
rates.  The pumping action is created by movement of two or three
diaphragms.  The movement of each diaphragm is caused by
expansion and contraction of an attached piezoelectric actuator.  
Coordination of the movement of the diaphragms creates
unidirectional flow of the fluid.  The piezoelectric actuators are
cantilevered between the pump body and the diaphragms to
provide greater deflection of the diaphragms.  The piezoelectric
actuators preferably are piezoelectric bimorphs such that the
diaphragms can function as both seals and pumps.
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